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Molybdenum oxide films offer a rich variety of properties for diverse applications, but exclusive synthesis of desired phases is a major challenge. Here, we demonstrate that oxygen flow ratio fO2 = [O2]/[Ar + O2] is crucial not only for phase selection of non-layered monoclinic MoO2 and layered orthorhombic α-MoO3 but also for controlling grain size and preferred orientation. Both mica and sapphire support exclusive MoO2 formation for 0.15 ≤ fO2 ≤ 0.25 at deposition temperatures Tdep = 400 and 500 °C, while α-MoO3 forms only at Tdep = 400 °C for 0.35 ≤ fO2 ≤ 0.5. Within the fO2 windows favoring each phase, high fO2 fosters large grains with out-of-plane 0k0 texture, except for MoO2 on c-sapphire at Tdep = 500 °C, where no fO2-texture correlation is discernible. These findings provide a framework for rational synthesis of single-phase monoclinic MoO2 and orthorhombic MoO3 with control over texture and microstructure to access desired properties. 

CrN-based alloy thin films are of interest as thermoelectric materials for energy harvesting. Ab initio calculations show that dilute alloying of CrN with 3 at. % W substituting Cr induce flat electronic bands and push the Fermi level EF into the conduction band while retaining dispersive Cr 3d bands. These features are conducive for both high electrical conductivity σ and high Seebeck coefficient α and, hence, a high thermoelectric power factor α2σ. To investigate this possibility, epitaxial CrWxNz films were grown on c-sapphire by dc-magnetron sputtering. However, even films with the lowest W content (x = 0.03) in our study contained metallic h-Cr2N, which is not conducive for a high α. Nevertheless, the films exhibit a sizeable power factor of α2σ ∼ 4.7 × 10−4 W m−1 K−2 due to high σ ∼ 700 S cm−1, and a moderate α ∼ − 25 μV/K. Increasing h-Cr2N fractions in the 0.03 < x ≤ 0.19 range monotonically increases σ, but severely diminishes α leading to two orders of magnitude decrease in α2σ. This trend continues with x > 0.19 due to W precipitation. These findings indicate that dilute W additions below its solubility limit in CrN are important for realizing a high thermoelectric power factor in CrWxNz films. 

Co/biphenyldithiol (BPDT)/Co nanolayer sandwiches are synthesized by metal sputter deposition and molecular sublimation. These results indicate molecular-nanolayer-induced effects on the morphology and chemistry, of interest for hybrid nanolaminates.